Advanced Energy’s New Power Meter Improves Accuracy and Performance in Precision RF Power Applications | Taiwan News
Integrating the power sensor and meter into one easy-to-use instrument, the new RF power meter simplifies monitoring and enables precise control
DENVER, COLORADO – Media reach – December 15, 2021 – Advanced energy (Nasdaq: AEIS) – a global leader in high-precision, high-tech power conversion, measurement and control solutions – today announced the GEMINI ™ 5540A RF (Radio Frequency) Power Meter. The new power meter provides highly accurate in-line RF power measurement in a flexible and convenient integrated unit for applications requiring precision RF power control in the semiconductor, communications, industrial and medical markets. As the leader in RF power solutions in the semiconductor industry, Advanced Energy continues to bring new capabilities to improve plasma power controls and performance of advanced etch and deposition processes.
Combining sensor and meter capabilities into one easy-to-use instrument, the GEMINI 5540A measures at frequencies from 0.2 to 200 MHz and power from 3 to 5,000 W with 2-sigma accuracy of ± 0.5 % + 0.5 W. This integrated instrument allows users to replace multiple instruments with a single meter for applications that require precise measurement and control of RF power.
“In demanding semiconductor processes such as high aspect ratio plasma etching (HAR), the precise control and chamber-to-chamber matching of the RF system has a direct impact on process performance,” said Gerry. Blumenstock, Vice President, Critical Sensing and Control Products at Advanced Energy. “With the new GEMINI 5540A, OEMs can precisely calibrate the system and monitor RF power in real time, improving the fidelity and consistency of advanced plasma processes.”
The GEMINI 5540A incorporates a large, easy-to-read OLED digital display that simultaneously displays forward and reverse power, voltage standing wave ratio (VSWR) and frequency. It automatically detects the frequency with no reconfiguration required for forward and reverse power measurements. The meter reduces calibration to every 12 months, compared to six months for conventional instruments. It operates with a 5V, 500mA input provided through a standard USB 2.0 port using either an external battery or an AC outlet and a standard USB adapter.
In addition to taking measurements directly, the meter can also be connected to a PC for data collection, storage and auditing using GEMINI Tools data visualization software from Advanced Energy.
For detailed product information and technical specifications, visit www.tegam.com/shop/rf-microwave/power-meters/no-product/gemini-5540a-rf-power-meter
About advanced energy
Advanced Energy (Nasdaq: AEIS) is a global leader in the design and manufacture of high precision power conversion, measurement and control solutions for critical applications and processes. AE’s power solutions enable customers to innovate in complex applications for a wide range of industries including semiconductor equipment, industry, manufacturing, telecommunications, data center computing and health care. With engineering know-how and responsive service and support around the world, the company is building collaborative partnerships to respond to technological advancements, propel customer growth, and innovate the future of energy. Advanced Energy has dedicated four decades to perfecting energy for its global customers and is headquartered in Denver, Colorado, United States. For more information visit www.advancedenergy.com.
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